Vacuum Sensors – HVS Series
Vacuum Sensors – HVS Series
The HVS Series is our vacuum sensing series. These miniature pirani-type vacuum sensors allow measurements in a pressure range from 1000 mbar (atmospheric pressure) down to 10-3 mbar (HVS 04), and 10 mbar down to 10-5 mbar resp. 10-6 mbar (HVS 03k resp. HVS 03g). They come in a small and robust TO-39 or TO-8 metal housing. Assembling the HVS 04 and HVS 03g in a TO-8 housing allows coverage of the full pressure range.
Features and Benefits
- Pirani measurement principle
- Very large pressure range 1000 mbar to 10-6 mbar
- Small form factor TO-39 or TO-8
- Robust metal housing
- High sensitivity
Specifications
| HVS 03k | HVS 04 | HVS 03g + 04 (dual) | ||
|---|---|---|---|---|
| Housing | TO-39 | TO-39 | TO-8 | Unit |
| Chip size | 4.0² | 1.0² | 5.0² + 1.0² | mm² |
| Max. signal voltage | 400 | 410 | 370 + 410 | mV |
| Resistance sensor chip | 9 | 1 | 9 + 1 | kOhm |
| On chip ref. resistor | 9 | 1 | 9 + 1 | kOhm |
| Supply voltage | 3.2 | 2 | 2 | V |
| Operating temperature | -20 .. 120 | -20 .. 120 | -20 .. 120 | °C |
| Storage temperature | -40 .. 120 | -40 .. 120 | -40 .. 120 | °C |
Typical Characteristics
HVS 04
HVS 03k
HVS 03g
