Pirani Measurement Principle
- Constant current
- Constant voltage
- Constant temperature
Pirani Gauge Characteristic Curve
The above curve shows the sensitivity of a relatively large chip (HVS 03k) with 4x4mm² chip size. You can combine this with a second, smaller chip with 1x1mm² which has its peak sensitivity in higher pressure regimes. This combination of two chips allows to sense the whole pressure range from atmospheric pressure down to 10 -6 mbar.